发明名称 Semiconductor chip having dummy pattern
摘要 A plurality of semiconductor chips are formed on a wafer. By forming a dummy pattern of a linear shape on an insulating film formed on a semiconductor chip along dicing lines provided for separating the plurality of semiconductor chips into the individual semiconductor chips, when the separation of the semiconductor chips is performed along the dicing lines, an advancing of a film peeling to a recognition mark for bonding within the dummy pattern or elements is prevented to reduce both a recognition error of information at the time of bonding of the semiconductor chip and the number of defective elements.
申请公布号 US5430325(A) 申请公布日期 1995.07.04
申请号 US19930081392 申请日期 1993.06.22
申请人 ROHM CO. LTD. 发明人 SAWADA, HIDEKI;OGATA, HIROMI
分类号 H01L21/78;H01L23/544;(IPC1-7):H01L21/78 主分类号 H01L21/78
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