SUBSTRATE DETECTING DEVICE

摘要

PURPOSE:To provide a substrate detecting device, which can detect the deviation of a substrate when the substrate is moved and mounted with a substrate moving and mounting device and has the simple structure. CONSTITUTION:Detectors 21 and 22 for detecting the edge part of a substrate are provided on a chuck plate 13 for holding a substrate 6. The substrate 6 and the chuck plate 13 are relatively moved by a specified amount, and the edge part of the substrate 6 is detected in this constitution. Whether the misregistration of the substrate 6 is within the specified amount or not is judged on the basis of whether the edge part of the substrate 6 is detected or not when the substrate 6 and the chuck plate 13 are relatively moved by the specified amount.