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发明名称	PROBER
摘要
申请公布号	JPH07169802(A)	申请公布日期	1995.07.04
申请号	JP19930313538	申请日期	1993.12.14
申请人	AGING TESUTA KAIHATSU KYODO KUMIAI	发明人	NAKANO KATSUYOSHI
分类号	G01R31/26;B81B3/00;G01R31/28;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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