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发明名称
APPARATUS FOR HEAT TREATMENT.
摘要
申请公布号
EP0635875(A4)
申请公布日期
1995.06.28
申请号
EP19930903315
申请日期
1993.02.05
申请人
ASM JAPAN
发明人
KYOGOKU MITSUSUKE
分类号
H01L21/677;(IPC1-7):H01L21/22;H01L21/31
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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