| 发明名称 |
Vaporized hydrogen silsesquioxane for depositing a coating. |
| 摘要 |
<p>The present invention relates to compositions suitable for depositing coatings containing silicon and oxygen on a substrate. The compositions contain vaporized hydrogen silsesquioxane in a carrier gas.</p> |
| 申请公布号 |
EP0659904(A2) |
申请公布日期 |
1995.06.28 |
| 申请号 |
EP19950103705 |
申请日期 |
1992.05.12 |
| 申请人 |
DOW CORNING CORPORATION |
发明人 |
GENTLE, THERESA EILEEN |
| 分类号 |
C01B33/12;B05D7/24;C09D4/00;C09D183/04;C23C16/00;C23C16/27;C23C16/40;H01L21/312;H01L21/316;(IPC1-7):C23C16/40;C01B33/00;C08G77/00 |
主分类号 |
C01B33/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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