发明名称 |
Method for treating substrates |
摘要 |
A device for applying fluid to a substrate which includes a head member having first and second opposed portions adapted for being fixedly positioned relative to each other. The device is particularly suited for treating a substrate as the substrate moves between the first and second portions. Each portion may in turn include a first channel located at a predetermined distance from the substrate for having a first fluid impinge on the substrate at a first velocity. Additionally, each portion may include a weir adjacent the first channel for having fluid pass thereover at an accelerated rate and thus at a greater velocity than the first fluid, this weir being located at a lesser distance than the first channel. Fluid inlet means is coupled to the respective portions to provide the fluid thereto at desired velocities. Significantly, a fluid blocking means (e.g., an elongated bar) is also included as part of the structure for maintaining the fluids at pre-established levels.
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申请公布号 |
US5427627(A) |
申请公布日期 |
1995.06.27 |
申请号 |
US19940179653 |
申请日期 |
1994.01.05 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CANESTARO, MICHAEL J.;MCBRIDE, DONALD G.;KONRAD, III, LOUIS J.;MOORE, RONALD J. |
分类号 |
C23F1/08;B05C3/12;B05C3/18;B05C5/02;C23G3/00;H05K3/00;H05K3/06;H05K3/18;H05K3/26;H05K3/42;(IPC1-7):B08B3/02 |
主分类号 |
C23F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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