METHOD FOR JOINING SPUTTERING TARGET MATERIAL,申请号JP19930310038-传众专利搜索

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发明名称	METHOD FOR JOINING SPUTTERING TARGET MATERIAL
摘要
申请公布号	JPH07166342(A)	申请公布日期	1995.06.27
申请号	JP19930310038	申请日期	1993.12.10
申请人	HITACHI LTD	发明人	HAMA HIROSHI;KAJIWARA HIDEFUMI
分类号	C23C14/34;(IPC1-7):C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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