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发明名称	SUBSTRATE COOLING EQUIPMENT
摘要
申请公布号	JPH07161696(A)	申请公布日期	1995.06.23
申请号	JP19930339325	申请日期	1993.12.04
申请人	ANELVA CORP	发明人	NAKAGAWA KOJIN
分类号	C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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