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发明名称
PATTERN FORMING METHOD
摘要
申请公布号
JPH07161712(A)
申请公布日期
1995.06.23
申请号
JP19930303088
申请日期
1993.12.02
申请人
FUJITSU LTD
发明人
TOMIZAWA SHIGERU;SATO KAZUAKI;SUGAWARA OMITOSHI;HOSOKAWA KAZUYUKI;YAMAWAKI SEIGO
分类号
H01L21/3205;H01L23/52;H05K3/06;(IPC1-7):H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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