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发明名称
ORGANOMETALLIC COMPOUND GAS FEEDING DEVICE OF VAPOR GROWTH DEVICE
摘要
申请公布号
JPH07161638(A)
申请公布日期
1995.06.23
申请号
JP19930303154
申请日期
1993.12.03
申请人
FUJI ELECTRIC CO LTD
发明人
ISHIKAWA YOSHIHIRO
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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