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发明名称
Verfahren zum Herstellen einer Öffnung mit abgeschrägten Kanten in einer Passivierschicht
摘要
申请公布号
DE3215101(C2)
申请公布日期
1995.06.22
申请号
DE19823215101
申请日期
1982.04.23
申请人
RCA CORP., NEW YORK, N.Y., US
发明人
FLATLEY, DORIS WINIFRED, BELLE MEAD, N.J., US;HSU, SHENG TENG, LAWRENCEVILLE, N.J., US
分类号
H01L21/768;H01L21/28;H01L21/3105;(IPC1-7):H01L21/310;H01L21/316;H01L21/311
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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