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发明名称
Titanium nitride removal method.
摘要
申请公布号
EP0388749(B1)
申请公布日期
1995.06.21
申请号
EP19900104635
申请日期
1990.03.12
申请人
MOTOROLA INC.
发明人
KNAPP, JAMES HOWARD;CARNEY, GEORGE FRANCIS;CARNEY, FRANCIS JOSEPH
分类号
B23K10/00;C23C16/34;C23F4/00;C23G5/00;(IPC1-7):C23G5/00;B08B7/00
主分类号
B23K10/00
代理机构
代理人
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地址
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