| 摘要 |
A load cell formed with a single crystal beam and strain gages deposited thereon. The single crystal beam may be advantageously formed from sapphire. The beam is arranged in the load cell with a fixed portion and a free portion to which weight forces may be applied. At least one strain gage is deposited on the beam to provide signals responsive to the applied weight forces. The method for making the load cell includes growing the crystal, depositing a strain sensitive layer on the crystal substrate, foxing the strain sensitive layer into at least one strain sensitive element and attaching a plurality of electrical leads to the strain sensitive elements to form strain gages. A weighing device is formed of a base upon which a plurality of the load beams are arranged for supporting a weigh platform.
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