MAGNETIC CIRCUIT FOR MAGNETRON SPUTTERING,申请号JP19930340513-传众专利搜索

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发明名称	MAGNETIC CIRCUIT FOR MAGNETRON SPUTTERING
摘要
申请公布号	JPH07157875(A)	申请公布日期	1995.06.20
申请号	JP19930340513	申请日期	1993.12.08
申请人	SHIN ETSU CHEM CO LTD	发明人	OHASHI TAKESHI
分类号	H05H1/46;C23C14/35;G11B5/85;G11B5/851;G11B11/10;G11B11/105;H01F7/02;(IPC1-7):C23C14/35	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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