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发明名称
VACUUM TREATER
摘要
申请公布号
JPH07161643(A)
申请公布日期
1995.06.23
申请号
JP19930305357
申请日期
1993.12.06
申请人
SHIBAURA ENG WORKS CO LTD
发明人
IWAMI MUNENORI;FUJII TAKASHI;KAWAMATA YOSHIO;ONODA TOSHIYASU
分类号
H01L21/302;H01L21/203;H01L21/205;H01L21/3065;(IPC1-7):H01L21/205;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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