| 摘要 |
<p>PURPOSE:To realize a highly reliable liquid crystal display provided with a wiring electrode having low wiring resistance in which micromachining can be effected at a nonlinear resistor element part. CONSTITUTION:A wiring electrode 2 comprises a first metal layer 20 (Al) having low specific resistance, and a second anodic oxidation metal layer 22 (TaW) having high specific resistance formed on the first metal layer 20. A conductive layer 24 (ITO) of same material as a liquid crystal driving electrode 6 (ITO) is also formed on the wiring electrode 2. A lower electrode 10 at an MIM element part 6 is formed by extending the second metal layer 22 (TaW) and no Al film is deposited at the MIM element part 6. This structure decreases the wiring resistance significantly while allowing micromachining of the MIM element and enhances the coverage characteristics of the upper electrode 14.</p> |
