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经营范围
发明名称
ELECTRON-BEAM ALIGNER
摘要
申请公布号
JPH07153655(A)
申请公布日期
1995.06.16
申请号
JP19930297168
申请日期
1993.11.29
申请人
NEC CORP
发明人
AIZAKI HISAAKI
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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