| 摘要 |
<p>PURPOSE:To carry out the measurement of a high accuracy not depending on the temperature of a fluid and the ambiance but depending on the flow rate, and of a wide measuring scope, by operating both outputs of a temperature measuring sensor having a diamond membrane, and a fluid measuring sensor. CONSTITUTION:In a temperature measuring sensor 802, a heating body 85 heats a diamond membrane 191 in a pulse form, while a temperature measuring resistor 83 detects the responding property of the membrane 191 to the heating as a temperature variation. A flow rate measuring sensor 803 has the same structure and function as the sensor 802. However, in the sensor 803, the flow velocity of a fluid contacting to the sensor is made almost zero by an O-ring plate and a slit, and the temperature of the fluid can almost be measured and output. On the other hand, since the sensor 803 is provided to contact to the flow directly, the flow rate and the temperature of the fluid can be measured and output. Both outputs are input to a CPU 88 through an amplifier 87 and the like, and the output corresponding to the flow rate is operated. The result is output from a D/A converter 801 as a flow rate.</p> |
