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发明名称
Methode und Vorrichtung zur feinen Bewegungssteuerung des Probenhalters eines Elektronenmikroskops.
摘要
申请公布号
DE68922598(D1)
申请公布日期
1995.06.14
申请号
DE19896022598
申请日期
1989.12.27
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
KOBAYASHI, HIROYUKI, MITO-SHI, JP;IZAWA, SHIGERU, KATSUTA-SHI,, JP;UKIANA, MOTOHIDE, KATSUTA-SHI, JP
分类号
G02B21/26;G05B19/23;H01J37/20;(IPC1-7):G05D3/20
主分类号
G02B21/26
代理机构
代理人
主权项
地址
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