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发明名称
Photodiode aus amorphem Silizium und ihr Herstellungsverfahren.
摘要
申请公布号
DE68922543(D1)
申请公布日期
1995.06.14
申请号
DE19896022543
申请日期
1989.08.10
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
TAKASAKI, KANETAKE, OMORIKITA 1-CHOME OTA-KU TOKYO 143, JP
分类号
H01L31/0248;C23C16/24;C23C16/44;C23C16/54;H01L31/09;H01L31/10;H01L31/20;(IPC1-7):H01L31/09;H01L31/101;H01L31/028;C23C16/50
主分类号
H01L31/0248
代理机构
代理人
主权项
地址
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