| 申请人 |
MITSUBISHI MATERIALS SILICON CORP., TOKIO/TOKYO, JP;SONY CORP., TOKIO/TOKYO, JP |
发明人 |
SAITO, YUICHI, URAWA-SHI SAITAMA-KEN, JP;SAKAI, SHINSUKE, NODA-SHI CHIBA-KEN, JP;HAYASHI, HISAO, ATSUGI-SHI KANAGAWA-KEN, JP;MATSUSHITA, TAKESHI, SAGAMIHARA-SHI KANAGAWA-KEN, JP |
