| 摘要 |
<p>PURPOSE:To provide a wafer tester which can always and stably hold a wafer carrier base for placing a wafer. CONSTITUTION:This apparatus is provided with a wafer carrier base 42 having a carrier surface for placing a wafer 1, a lift mechanism 3 to lift or lower the carrier base 42, a shaft 38 linked to the lift mechanism 3 and a tension spring member 50 so linked as to pull the wafer base 43 and the shaft 38 mutually. A housing 10 is provided with a receiving tray 58 so arranged to make a carrier surface of the wafer carrier base 42 parallel with an arm 60 in the lowering of the wafer carrier base 42 with the lift mechanism 3. Then, with the lift mechanism 3, the wafer carrier base 42 is forced onto the receiving tray 58 with the action of a tension spring as the wafer carrier base 42 is lowered.</p> |
