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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07147321(A)
申请公布日期
1995.06.06
申请号
JP19930296493
申请日期
1993.11.26
申请人
NEC CORP
发明人
WATANABE KENJI
分类号
H01L21/28;H01L21/285;H01L21/768;H01L23/522;(IPC1-7):H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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