| 摘要 |
PURPOSE:To integrate a support substrate and a reinforcing frame in a short time and with high accuracy by integrating the support frame and the reinforcing frame by the Au-Si eutectic junction. CONSTITUTION:An X-ray absorbing metal pattern is formed of Au, Ta, W, Pt, Mo, Re, TaN, WN and WTi, while an X-ray transmitting support film 2 consists of SiN, BN, SiC, Be and polyimide. A support frame 3 is constituted by a workable rigid body while usually consisting of single crystal silicon, and a reinforcing frame 7 is the rigid body while a quartz plate is used therefor. A junction part 8 of the support frame 3 and the reinforcing frame 7 is an Si-Au eutectic junction. Accordingly, the Au-Si eutectic junction is utilized for junction of the support substrate 3 and the reinforcing frame 7, while the silicon face of the support substrate 3 and the face having a metal layer of the reinforcing frame 7 are made to adhere closely and to oscillate by heating. Thereby, junction can be relatively simply and mechanically with high accuracy performed. |
