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发明名称
APPLICATION DEVICE
摘要
申请公布号
JPH07142378(A)
申请公布日期
1995.06.02
申请号
JP19930312539
申请日期
1993.11.18
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK
发明人
TATEYAMA KIYOHISA;KITAMURA SHINJI
分类号
G03F7/16;B05C11/08;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/16
代理机构
代理人
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