| 摘要 |
PURPOSE:To provide component parts of a semiconductor aligner, can be fitted to the semiconductor aligner in a short time and which can be easily adjusted, and the semiconductor aligner. CONSTITUTION:Components parts of a semiconductor aligner comprises a non- linear optical crystal device 20 and a frame 10 housing this nonlinear optical crystal device. It is preferable to have another optical part in addition to the one fitted to the frame so that the fitting position to the frame can be adjusted after the frame 10 is fitted to the semiconductor aligner. The semiconductor aligner equipped with an aligner light source in which the nonlinear optical crystal device is installed, has an optical part fitted to a part, in which the nonlinear optical crystal device is installed, for adjusting the installation of the nonlinear optical crystal device. |
