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发明名称
METHOD FOR CORRECTING AMOUNT OF DEFLECTION OF ELECTRON BEAM EXPOSURE DEVICE
摘要
申请公布号
JPH07142321(A)
申请公布日期
1995.06.02
申请号
JP19930145797
申请日期
1993.06.17
申请人
FUJITSU LTD
发明人
KIUCHI TAKASHI
分类号
H01L21/30;H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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