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发明名称
Herstellverfahren für einen Piezoantrieb.
摘要
申请公布号
DE59105309(D1)
申请公布日期
1995.06.01
申请号
DE19915005309
申请日期
1991.09.10
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
MOHAUPT, JUTTA, W-8000 MUENCHEN 2, DE;LUBITZ, KARL, DR., W-8012 OTTOBRUNN, DE;SCHNOELLER, MANFRED, DR., W-8048 HAIMHAUSEN, DE;WERSING, WOLFRAM, DIPL.-PHYS., W-8011 KIRCHHEIM, DE
分类号
H01L41/08;H01L41/24;(IPC1-7):H01L41/08
主分类号
H01L41/08
代理机构
代理人
主权项
地址
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