| 摘要 |
In a conventional load handling system which has a load storage device and a load handling device and moves a load between these devices, when the load is not resistant to dust and the like, the entire system including the load storage device needs be provided inside a clean room, resulting in high installation costs and high operating costs of the system. Thus, the system cannot be readily adopted. In contrast, a load take in/out sections each for the load storage device and the load handling device are provided to face the clean room defined by partition walls, and a load is transferred between these devices inside the clean room. Thus, although the load storage device and the load handling device can be placed in a non-clean room (an atmospheric air chamber, etc.), a load can be moved between the load storage device and the load handling device in a sufficiently clean atmosphere by using the clean room. The system does not need be entirely formed as a clean room, so that the installation costs and operating costs of the system can be reduced. Hence, the system can be readily adopted.
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