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发明名称
BILDANORDNUNG MIT MILLIMETER-WELLEN.
摘要
申请公布号
DE3853684(D1)
申请公布日期
1995.06.01
申请号
DE19883853684
申请日期
1988.11.04
申请人
MILLITECH CORP., SOUTH DEERFIELD, MASS., US
发明人
HUGUENIN, G., RICHARD, SOUTH DEERFIELD, MA 01373, US;GOLDSMITH, PAUL, F., LEVERETT, MA 01054, US;DEO, NARESH, C., CONWAY, MA 01360, US;WALKER, DAVID, K., NORTHFIELD, MA 01360, US
分类号
H01L29/864;G01S7/02;G01S7/03;G01S7/28;G01S13/89;G01V8/00;H01L29/47;H01L29/872;H01L47/02;(IPC1-7):G01S13/89
主分类号
H01L29/864
代理机构
代理人
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