Apparat und Methode zur Inspektion eines Substrates.,申请号DE19916009285-传众专利搜索

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发明名称	Apparat und Methode zur Inspektion eines Substrates.
摘要
申请公布号	DE69109285(D1)	申请公布日期	1995.06.01
申请号	DE19916009285	申请日期	1991.08.02
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	BOEHMER, GUDRUN, W-7000 STUTTGART 80, DE
分类号	G01B11/02;G01N21/88;G01N21/94;G01N21/956;G02B21/14;H01L21/66;(IPC1-7):G01N21/88	主分类号	G01B11/02
代理机构		代理人
主权项
地址

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