| 摘要 |
<p>PURPOSE:To enhance the quality or performance and yield of a product by effectively preventing the contamination of an object to be treated in a vacuum container. CONSTITUTION:In a container 6 of a clean vacuum atomosphere receiving an object 8 to be treated, the contamination source regions such as the seal regions of the bellows 4 and O-ring 2 in the container 6 are covered with shield plates 10, 11 and the contamination source regions 2,4 are isolated from the space in the container 6 by the shield plates 10, 11 and the contaminants discharged from the contamination source regions 2, 4 are caught by the shield plates 10, 11 to be prevented from adhering to the object 8 to be treated.</p> |
