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发明名称
Sealing processing chambers
摘要
申请公布号
GB2284096(A)
申请公布日期
1995.05.24
申请号
GB19940022824
申请日期
1994.10.11
申请人
* ELECTROTECH LIMITED
发明人
GORDON ROBERT * GREEN
分类号
C23C14/56;H01L21/00;H01L21/02;H01L21/677;(IPC1-7):H01L21/00
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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