发明名称 |
Monolithic chip containing integrated circuitry and suspended microstructure |
摘要 |
The invention is a monolithic sensor comprising a silicon substrate, a suspended polysilicon microstructure for sensing a condition disposed above and suspended from the substrate, and circuitry for resolving a signal based on said sensed condition, the circuitry including bipolar circuit elements and MOS circuit elements. One disclosed embodiment is particularly adapted for sensing acceleration by means of a differential capacitor arrangement in which one capacitor plate in the arrangement is moveable responsive to an acceleration.
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申请公布号 |
US5417111(A) |
申请公布日期 |
1995.05.23 |
申请号 |
US19930075043 |
申请日期 |
1993.06.10 |
申请人 |
ANALOG DEVICES, INC. |
发明人 |
SHERMAN, STEVEN J.;TSANG, ROBERT W. K.;CORE, THERESA A.;BROKAW, A. PAUL |
分类号 |
B81B3/00;B81C99/00;G01P15/08;G01P15/125;G01P15/13;(IPC1-7):G01P15/125 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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