发明名称 |
METAL FILM FORMING METHOD |
摘要 |
A metal film forming method comprises steps of: forming a non-monocrystalline metal film principally composed of aluminum, in contact, at least in a part thereof, with a monocrystalline metal principally composed of aluminum; and heating the non-monocrystalline metal film to convert at least a part thereof into monocrystalline state. <IMAGE> |
申请公布号 |
KR950005257(B1) |
申请公布日期 |
1995.05.22 |
申请号 |
KR19910011444 |
申请日期 |
1991.07.06 |
申请人 |
TSUBOUCHI, KAZUO |
发明人 |
TSUBOUCHI, KAZUO;MASU, KATSUYA |
分类号 |
H01L21/321;H01L21/768;H01L23/532 |
主分类号 |
H01L21/321 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|