| 摘要 |
A micromachined push-pull accelerometer formed with dual vibrating beam transducers in one plane of a silicon substrate includes a pair of proof masses or pendulums supported by flexures formed in a plane adjacent a surface of the silicon substrate opposite the vibrating beam transducers on opposing sides of the pendulums to define opposing pendulous axes. The accelerometer is configured such that the dual vibrating beam transducers are in a push-pull relationship (e.g., one transducer is subjected to a tension force while the other transducer is subjected to a compression force in response to accelerations along a sensitive axis SA). In order to form the push-pull configuration, one vibrating beam transducer is connected to one pendulum on a side opposite the hinge axis for that pendulum while the other vibrating beam transducer is connected to the other pendulum on the same side as the hinge axis for that pendulum. Such a configuration not only provides for cancellation of cross acceleration over a relatively wide frequency range but, in addition, provides an effective sensitive axis SA, generally perpendicular to the surface of the silicon substrate, thus obviating the need for a special mounting structure while obviating the problem relating to the rotation of the input axis. The configuration also enables the electrically conductive material for the electrodes to be deposited on one side of the substrate, thus simplifying the fabrication of the accelerometer. |
