Array of thin film actuated mirrors for use in an optical projection system and method for the manufacture thereof.

摘要

An array of M x N thin film actuated mirrors for use in an optical projection system comprises an active matrix, an array of M x N thin film actuating structures, each of the thin film actuating structures being provided with a first and a second actuating parts, each of the first and second actuating parts including at least a thin film layer of a motion-inducing material, a pair of electrodes, each of the electrodes being provided on top and bottom of the motion-inducing thin film layer, an array of M x N supporting members, each of the supporting members being used for holding each of the actuating structures in place by cantilevering each of the actuating structures and also for electrically connecting each of the actuating structures and the active matrix, and an array of M x N mirror layers for reflecting light beams, each of the mirror layers further including a first side, a second opposing side and a center portion located therebetween, wherein the first side and the second opposited side of each of the mirror layers are secured on top of the first and second actuating parts of each of the actuating structures, respectively, such that when the first and second actuating parts in each of the actuating structures deform in response to an electrical signal applied between the first and second electrodes, the center portion of the corresponding mirror layer tilts while remaining planar, thereby allowing all of the center portion to reflect the light beams, resulting in an increased optical efficiency.