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发明名称
摘要
申请公布号	JPH0746226(B2)	申请公布日期	1995.05.17
申请号	JP19840246991	申请日期	1984.11.24
申请人		发明人
分类号	G03F7/22;G03B27/06;G03B27/20;(IPC1-7):G03F7/22	主分类号	G03F7/22
代理机构		代理人
主权项
地址

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