发明名称 |
Method of forming a single crystal film of sodium-beta -alumina |
摘要 |
Disclosed herein is a method of forming a single crystal film of sodium-beta''-alumina, comprising the steps of providing a single crystal substrate with one surface being arranged to minimize nucleation sites thereon, at least a portion of the substrate including alumina. A single crystal substrate is then deposited in a chamber, along with a precursor in the chamber. The precursor has a sufficient quantity of sodium species in a vapor phase and at an energy level sufficient to react with the alumina to form sodium-beta''-alumina. The precursor also includes a sufficient quantity of a stabilizing ion with a valence equal to or lower than aluminum to minimize decomposition of sodium-beta''-alumina to sodium-beta-alumina.
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申请公布号 |
US5415127(A) |
申请公布日期 |
1995.05.16 |
申请号 |
US19930088316 |
申请日期 |
1993.07.07 |
申请人 |
ONTARIO CENTRE FOR MATERIALS RESEARCH |
发明人 |
NICHOLSON, PATRICK S.;TAN, AICHUN;KUO, CHU K. |
分类号 |
C30B25/02;(IPC1-7):C30B25/08 |
主分类号 |
C30B25/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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