发明名称 PIEZO-ACTUATOR
摘要 PURPOSE:To realize a piezo-actuator free from a leakage of liquid and excellent in handling properties, safety, and maintainability. CONSTITUTION:A displacement magnifying rubber 4 provided with a recessed part 4a located at its upper center and provided to the upside of a piezo-device 3, a displacement magnifying part 2 provided onto the displacement magnifying rubber 4 enveloping it, and a pushing rod 7 which is inserted into the recessed part 4a of the displacement magnifying rubber 4 penetrating through the upper part of the displacement magnifying part 2 are provided. The displacement of the piezo-device 3 is magnified and transmitted through the pushing rod 7, wherein a rubber is used as an operating medium in place of operating fluid, so that a sealing mechanism which prevents liquid from leaking out of a device can be dispensed with, and a piezo-actuator which is remarkably simplified in structure, lessened in size and weight, and improved in handling properties, maintainability, and safety, and accurate in displacemetn can be realized.
申请公布号 JPH07122792(A) 申请公布日期 1995.05.12
申请号 JP19930266251 申请日期 1993.10.25
申请人 NATL SPACE DEV AGENCY JAPAN<NASDA>;MITSUBISHI HEAVY IND LTD 发明人 YODA SHINICHI;NAKAMURA TOMIHISA;SAMEJIMA HIROTO;GOSHIYOZONO TOSHIMI;MATSUMOTO HIROAKI;KONO YASUSHI
分类号 H01L41/083;G05D3/00;H01L41/09;H02N2/00 主分类号 H01L41/083
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