| 摘要 |
PURPOSE:To prolong the service life of a refractory crucible, to reduce the production cost of electric parts and functional elements and to stabilize the quality. CONSTITUTION:A crucible evaporating source is composed of a two step structure of the refractory crucible 7 having a drain hole in the bottom and a water cooling hearth 9 having a plug structure serving as the cap of the drain hole. Furthermore, the water cooling hearth 9 is connected to a drive unit 10 so that the water cooling hearth 9 itself moves up and down. |
