| 摘要 |
The present invention intends to provide a gap-forming sheet for laminating a plurality of flat plate electrodes, for example, for controlling electron beam at high accuracy in a short period of time. Gap-forming sheets each including a support member formed by depolymerizing resin, gap members for providing gaps between the flat plate electrodes, and a bonding paste for bonding the flat plate electrodes, are held between the flat plate electrodes, which are baked to decompose the support members, and thus, by melting the bonding paste, the flat plate electrodes are joined together for lamination, with gaps being provided by the gap members.
|
