| 摘要 |
<p>PURPOSE:To obtain a wafer cassette and an auxiliary member thereof capable of accurately performing housing of semiconductor wafers. CONSTITUTION:A plurality of thresholds 2A, 2A and 2B, 2B are alternately provided on the inner wall of side surface parts 11a, 11b every distance DELTAY. The threshold pairs 2A, 2A are respectively formed in the X direction so as to be faced to each other by the length LX1, and the threshold pairs 2B, 2B are respectively formed in the X direction so as to be faced to each other by the length of LX2 (>LX1). Accordingly, the visual discrimination of the threshold pairs respectively faced to each other, and placed in the positional relationship is facilitated by the difference between the formed lengths extended to the inner part of a cassette main body between the mutually adjacent threshold pairs, thereby housing of semiconductor wafers can be accurately performed.</p> |
