发明名称 Process for preparing a silicon colloid
摘要 There is described a process for preparing a silicon colloid, in which silicon is vaporised in the presence of hydrogen and the resulting silicon particles are brought into contact with a solvent. Also described is a process for forming a thin silicon film using this silicon colloid.
申请公布号 DE4437469(A1) 申请公布日期 1995.05.04
申请号 DE19944437469 申请日期 1994.10.19
申请人 NIPPON OIL CO., LTD., TOKIO/TOKYO, JP 发明人 AOKI, NOBUO, YOKOHAMA, KANAGAWA, JP
分类号 B01J13/00;C01B33/02;C30B5/00;H01L31/18 主分类号 B01J13/00
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