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发明名称
Fremgangsmåte og elektrodesystem for eksitering av et plasma
摘要
申请公布号
NO951682(D0)
申请公布日期
1995.05.02
申请号
NO19950001682
申请日期
1995.05.02
申请人
NKT RESEARCH CENTER A/S
发明人
GLEJBOEL, KRISTIAN
分类号
H01J37/32;H05H1/46;(IPC1-7):H05H
主分类号
H01J37/32
代理机构
代理人
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地址
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