发明名称 Ceramic body
摘要 The invention provides a ceramic body and a method of manufacturing such a body. The body is characterized by its composition, which comprises 20-30 at. % of magnesium, 20-30 at. % of silicon, 40-60 at. % of nitrogen and maximally 15 at. % of oxygen. A preferred composition corresponds to the formula MgSiN2-xOx, where x is smaller than 0.5. The manufacture of the ceramic body in accordance with the invention is simpler and cheaper than that of aluminium nitride, and a number of properties of said ceramic material are better than those of the known aluminium oxide.
申请公布号 US5411924(A) 申请公布日期 1995.05.02
申请号 US19940196938 申请日期 1994.02.15
申请人 U.S. PHILIPS CORPORATION 发明人 GROEN, WILHELM A.;KRAAN, MARCELLINUS J.;DE WITH, GIJSBERTUS
分类号 C04B35/58;C04B35/584;C04B35/593;C04B35/597;H01L23/15;H01L23/373;(IPC1-7):C04B35/58 主分类号 C04B35/58
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