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发明名称
摘要
申请公布号
JPH0719142(Y2)
申请公布日期
1995.05.01
申请号
JP19850166500U
申请日期
1985.10.31
申请人
发明人
分类号
H01L21/205;C30B25/10;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
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