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发明名称
Meßvorrichtung zum Messen kleinster Verschiebebeträge
摘要
申请公布号
DE3606090(C2)
申请公布日期
1995.04.27
申请号
DE19863606090
申请日期
1986.02.26
申请人
SHARP K.K., OSAKA, JP
发明人
YAMAMOTO, OSAMU, NARA, JP;HAYASHI, HIROSHI, KYOTO, JP;MATSUI, SADAYOSHI, TENRI, NARA, JP;TAKIGUCHI, HARUHISA, NARA, JP;MIYAUCHI, NOBUYUKI, TENRI, NARA, JP
分类号
G01D5/30;G01B9/02;G01B11/00;G01D5/26;H01S3/08;(IPC1-7):G01B11/02
主分类号
G01D5/30
代理机构
代理人
主权项
地址
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