| 摘要 |
<p>PURPOSE:To enable effectively adjusting the temperature of an electrostatically attracted specimen, in a wide range from a very low temperature to a high temperature. CONSTITUTION:The title specimen stand 1 is equipped with an electrostatic chuck 11 which electrostatically attracts a specimen 10, and a cooling tank 12 which is arranged below the electrostatic chuck 11, which consists of a flat plate electrode 101, heater wires 102 arranged in slits 106 formed in the flat plate electrode 101 so as to maintain an insulated state from the flat plate electrode 101, and a dielectric film 103 formed on the upper surface of the flat plate electrode 101 containing the inside of the slits 106. Thereby the specimen 10 electrostatically attraced on the upper surface of the dielectric film 103 can be effectively heated and cooled.</p> |
