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发明名称
Verfahren zum Trocknen von Oberflächen.
摘要
申请公布号
DE68921757(D1)
申请公布日期
1995.04.20
申请号
DE19896021757
申请日期
1989.11.23
申请人
CFM TECHNOLOGIES, INC., LIONVILLE, PA., US
发明人
MCCONNELL, CHRISTOPHER F., WEST CHESTER, PA.19380, US;WALTER, ALAN E., EXTON,PA. 19341, US
分类号
F26B21/14;H01L21/00;H01L21/306;(IPC1-7):H01L21/00
主分类号
F26B21/14
代理机构
代理人
主权项
地址
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